Synthesis of silicon nanocrystal memories by sputter deposition
Aim of this work was, to investigate the preparation of Si NC memories by sputter deposition. The milestones are as follows: - Review of relevant literature. - Development of processes for an ultrathin tunnel-oxide and high quality sputtered SiO2 for use as control-oxide. - Evaluation of methods for...
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| Format: | Others |
| Language: | English |
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Forschungszentrum Dresden
2010
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28765 http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28765 http://www.qucosa.de/fileadmin/data/qucosa/documents/2876/6965.pdf |