Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods
Research on the characterisation and understanding of pulsed magnetron discharges used for the deposition of thin, especially dielectric, films has been carried out between 2003 and 2008 at Chemnitz University of Technology. This thesis is a collection and summary of the original research during thi...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Doctoral Thesis |
| Language: | English |
| Published: |
Universitätsbibliothek Chemnitz
2012
|
| Subjects: | |
| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-81968 http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-81968 http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/Habilitation_Thomas_Welzel.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/habil_welzel_offen.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/signatur.txt.asc |