Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods

Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods

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Research on the characterisation and understanding of pulsed magnetron discharges used for the deposition of thin, especially dielectric, films has been carried out between 2003 and 2008 at Chemnitz University of Technology. This thesis is a collection and summary of the original research during thi...

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Bibliographic Details
Main Author: Welzel, Thomas
Other Authors: TU Chemnitz, Fakultät für Naturwissenschaften
Format: Doctoral Thesis
Language:English
Published: Universitätsbibliothek Chemnitz 2012
Subjects:
Magnetronzerstäubung
Pulsplasmen
Emissive Sonde
Emissive Probe
Langmuir Probe
Magnetron Sputtering
Mass Spectrometry
Optical Spectroscopy
Plasma Diagnostics
Pulsed Discharges
Thin Film Technology
ddc:530
Dünnschichttechnik
Langmuir-Sonde
Massenspektrometrie
Optische Spektroskopie
Plasmadiagnostik
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-81968
http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-81968
http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/Habilitation_Thomas_Welzel.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/habil_welzel_offen.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/signatur.txt.asc

Internet

http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-81968
http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-81968
http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/Habilitation_Thomas_Welzel.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/habil_welzel_offen.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/8196/signatur.txt.asc

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