AMC 2015 – Advanced Metallization Conference
Since its inception as the Tungsten Workshop in 1984, AMC has served as the leading conference for the interconnect and contact metallization communities, and has remained at the leading edge of the development of tungsten, aluminum, and copper/low-K interconnects. As the semiconductor industry evol...
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| Language: | English |
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Universitätsbibliothek Chemnitz
2016
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-206986 http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-206986 |