Gallium-based Solid Liquid Interdiffusion Bonding of Semiconductor Substrates near room temperature
Within this work, bonding technologies based upon the alloying of gallium with other metals to assemble semiconductor substrates for the possible application of encapsulation and 3D-integration of micro systems and devices have been researched. Motivated by the important demand to achieve low temper...
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| Format: | Doctoral Thesis |
| Language: | English |
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Universitätsbibliothek Chemnitz
2015
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-167981 http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-167981 http://www.qucosa.de/fileadmin/data/qucosa/documents/16798/Dissertation_Froemel.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/16798/signatur.txt.asc |