Time-resolved characterisation of pulsed magnetron discharges for the deposition of thin films with plasma diagnostic methods
Research on the characterisation and understanding of pulsed magnetron discharges used for the deposition of thin, especially dielectric, films has been carried out between 2003 and 2008 at Chemnitz University of Technology. This thesis is a collection and summary of the original research during thi...
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| Format: | Doctoral Thesis |
| Language: | English |
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Universitätsbibliothek Chemnitz
2010
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:ch1-201000922 http://nbn-resolving.de/urn:nbn:de:bsz:ch1-201000922 http://www.qucosa.de/fileadmin/data/qucosa/documents/6017/data/habil_welzel.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/6017/20100092.txt |