Entwicklung eines hybrid-integrierten Gitterspektrometers basierend auf einem mikro-opto-elektro-mechanischen Bauelement
The subject of this thesis is the development of a hybrid-integrated scanning grating spectrometer based on a micro-opto-electro-mechanical device or a micro-opto-electromechanical system, respectively. Features of spectral measurement system to be emphasized are a miniaturized construction with the...
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Format: | Doctoral Thesis |
Language: | deu |
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Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden
2016
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Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-197435 http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-197435 http://www.qucosa.de/fileadmin/data/qucosa/documents/19743/Promotionsschrift.pdf |