Ortsaufgelöste Messung der Gitterverspannungen in Halbleitern mittels Dunkelfeld off-axis Elektronenholographie

Ortsaufgelöste Messung der Gitterverspannungen in Halbleitern mittels Dunkelfeld off-axis Elektronenholographie

Die Dunkelfeld off-axis Elektronenholographie (DFH) im Transmissionselektronenmikroskop ist eine nanoskalige Interferometriemethode, die es erlaubt, eine ausgewählte Beugungswelle eines Kristalls aufzuzeichnen und anschließend als zweidimensionale Amplituden- und Phasenverteilung zu rekonstruieren....

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Bibliographic Details
Main Author:	Sickmann, Jan
Other Authors:	Technische Universität Dresden, Fakultät Mathematik und Naturwissenschaften
Format:	Doctoral Thesis
Language:	deu
Published:	Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden 2015
Subjects:	Transmissionselektronenmikroskopie Dunkelfeldholographie Geometrische Phase Gitterverspannung Dehnungsmessung mechanisch verspannte Halbleiterstrukturen transmission electron microscopy dark-field electron holography geometric phase lattice strain strain mapping strained semiconductor devices ddc:530 rvk:UH 6300
Online Access:	http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-160646 http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-160646 http://www.qucosa.de/fileadmin/data/qucosa/documents/16064/sickmann_dissertation_2014_a-1b.pdf

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