High-rate growth of hydrogenated amorphous and microcrystalline silicon for thin-film silicon solar cells using dynamic very-high frequency plasma-enhanced chemical vapor deposition

Thin-film silicon tandem solar cells based on a hydrogenated amorphous silicon (a-Si:H) top-cell and a hydrogenated microcrystalline silicon (μc-Si:H) bottom-cell are a promising photovoltaic technology as they use a combination of absorber materials that is ideally suited for the solar spectrum. Ad...

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Bibliographic Details
Main Author: Zimmermann, Thomas
Other Authors: Technische Universität Dresden, Fakultät Elektrotechnik und Informationstechnik
Format: Doctoral Thesis
Language:English
Published: Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden 2014
Subjects:
VHF
Online Access:http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-131765
http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-131765
http://www.qucosa.de/fileadmin/data/qucosa/documents/13176/E_U_183_elektronische%20Version.pdf