Plasmaphysikalische Charakterisierung einer magnetfeldgestützten Hohlkathoden-Bogenentladung und ihre Anwendung in der Vakuumbeschichtung

Plasmaphysikalische Charakterisierung einer magnetfeldgestützten Hohlkathoden-Bogenentladung und ihre Anwendung in der Vakuumbeschichtung

Die vorliegende Dissertation behandelt Charakterisierung, Modellbildung sowie Anwendung einer magnetfeldgestützten Hohlkathoden-Bogenentladung. Hohlkathoden sind seit den 1960er Jahren Gegenstand grundlagen- sowie anwendungsorientierter Forschung und werden seit 20 Jahren am Fraunhofer-Institut für...

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Bibliographic Details
Main Author:	Zimmermann, Burkhard
Other Authors:	Technische Universität Dresden, Fakultät Mathematik und Naturwissenschaften
Format:	Doctoral Thesis
Language:	deu
Published:	Saechsische Landesbibliothek- Staats- und Universitaetsbibliothek Dresden 2013
Subjects:	Vakuumbeschichtung Hohlkathode Bogenentladung Langmuirsonde Plasma DLC Kohlenstoff PECVD Dünnschichtcharaktierisierung vacuum coating hollow cathode arc discharge Langmuir probe plasma carbon thin film characterization ddc:530 rvk:UX 1500
Online Access:	http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-101747 http://nbn-resolving.de/urn:nbn:de:bsz:14-qucosa-101747 http://www.qucosa.de/fileadmin/data/qucosa/documents/10174/Zimmermann.pdf

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