Nasschemische Siliciumbehandlung in Flusssäure-haltigen Lösungen mit den Oxidationsmitteln Wasserstoffperoxid und Ozon

Nasschemische Siliciumbehandlung in Flusssäure-haltigen Lösungen mit den Oxidationsmitteln Wasserstoffperoxid und Ozon

Die Siliciumauflösung in Flusssäure-Wasserstoffperoxid- und Flusssäure-Ozon-Lösung ist aufgrund der, aus der Oxidation des Siliciums, formal resultierenden Reaktionsprodukte Wasser und Sauerstoff interessant. Der Auflösungsprozess, speziell die Oxidation des Siliciums / Elektronenlochinjektion ins S...

Full description

Bibliographic Details
Main Author:	Gondek, Christoph
Other Authors:	TU Bergakademie Freiberg, Chemie und Physik
Format:	Doctoral Thesis
Language:	deu
Published:	Technische Universitaet Bergakademie Freiberg Universitaetsbibliothek "Georgius Agricola" 2017
Subjects:	Halbleiterätzverfahren Reaktivitätsstudien Siliciumauflösung Ätzprozesse Oberflächeneigenschaften kinetische Studien Silicon etching hydrofluoric acid hydrogen peroxide ozone reactivitiy studies surface properties ddc:540 Silicium Ätzen Wasserstoffperoxid Ozon Reaktionskinetik Halbleiteroberfläche
Online Access:	http://nbn-resolving.de/urn:nbn:de:bsz:105-qucosa-226256 http://nbn-resolving.de/urn:nbn:de:bsz:105-qucosa-226256 http://www.qucosa.de/fileadmin/data/qucosa/documents/22625/Gondek_Dissertation_2017_Ver%C3%B6ffentlichung_1b.pdf

Similar Items

Nanoscale Imaging of Mechanical Properties of Polymeric Materials Using Nanotomography and Scanning Force Microscopy Based Methods
by: Dietz, Christian
Published: (2008)

Untersuchungen zur Sauerstoffausscheidung in hoch bordotiertem Silicium
by: Zschorsch, Markus
Published: (2009)

Modulation der Aldosteron-induzierten Transaktivierungsaktivität des Mineralokortikoidrezeptors - Rolle von Calcium, Proteinkinase C, PI-3-Kinase sowie H2O2
by: Pfau, Anja
Published: (2009)

Nanoscale Imaging of Mechanical Properties of Polymeric Materials Using Nanotomography and Scanning Force Microscopy Based Methods
by: Dietz, Christian
Published: (2008)

Two-Dimensional Electron Systems at Surfaces — Spin-Orbit Interaction and Electronic Correlations
by: Höpfner, Philipp Alexander
Published: (2012)

SULARIN OZONLANMASINDAKİ GELİŞMELER
by: Ensar OĞUZ, et al.
Published: (2001-03-01)

SULARIN OZONLANMASINDAKİ GELİŞMELER
by: Ensar OĞUZ, et al.
Published: (2001-03-01)

SULARIN OZONLANMASINDAKİ GELİŞMELER
by: Ensar OĞUZ, et al.
Published: (2001-03-01)

SULARIN OZONLANMASINDAKİ GELİŞMELER
by: Ensar Oğuz, et al.
Published: (2001-03-01)

Geometrische Struktur und Morphologie epitaktisch gewachsener ZnSe-Schichtsysteme
by: Weigand, Wolfgang
Published: (2005)

Beiträge zum Verständnis des sauren nasschemischen Ätzens von Silicium
by: Lippold, Marcus
Published: (2014)

Isentropic ozone transport across the tropopause in the lower stratosphere and upper troposphere
by: Jing, Ping
Published: (2006)

DEVELOPMENTS IN OZONATION OF WATERS
by: Ensar OĞUZ, et al.
Published: (2001-03-01)

Optische Charakterisierung von II-VI-Halbleiter-Oberflächen in Kombination mit First-Principles-Rechnungen
by: Wagner, Joachim
Published: (2003)

Tropospheric ozone assessment report: Global ozone metrics for climate change, human health, and crop/ecosystem research
by: Allen S. Lefohn, et al.
Published: (2018-04-01)

Increase of ozone concentrations, its temperature sensitivity and the precursor factor in South China
by: Y. C. Lee, et al.
Published: (2014-08-01)

Graphene-Based Catalysts for Ozone Processes to Decontaminate Water
by: Fernando J. Beltrán, et al.
Published: (2019-09-01)

Evaluation of Version 3 Total and Tropospheric Ozone Columns From Earth Polychromatic Imaging Camera on Deep Space Climate Observatory for Studying Regional Scale Ozone Variations
by: Natalya A. Kramarova, et al.
Published: (2021-09-01)

Ozonation of sulfamethoxazole in wastewater
by: Leclair, Christine.
Published: (2006)

Variation of the stratospheric ozone layer height and the quasi-biennial oscillation
by: Bao, Xiaoping
Published: (2009)

The Effect of Ozonation in Reducing Trihalomethane Formation Potential
by: Lin, Simon H.
Published: (1981)

Efficacy of Catalytic Ozonation Advanced Oxidation Processes Compared to Traditional Ozone-Based Advanced Oxidation Processes for Degradation of Recalcitrant Compounds
by: Sevilla Esparza, Cindy Jocelyn
Published: (2020)

Tropospheric Ozone Assessment Report: Present-day distribution and trends of tropospheric ozone relevant to climate and global atmospheric chemistry model evaluation
by: A. Gaudel, et al.
Published: (2018-05-01)

Связь состояния общего содержания озона над антарктической станцией Академик Вернадский с озоновой дырой над Антарктидой
by: V. F. Martazinova, et al.
Published: (2016-01-01)

The Derivation of Tropospheric Column Ozone Using the TOR Approach and Mapping Technique
by: Yang, Qing
Published: (2008)

Ozone, as an antimicrobial agent in minimally processed foods
by: Kim, Jin-Gab
Published: (1998)

Evaluation of Upper Atmospheric Ozone Data provided by a Differential-Absorption Lidar
by: Kubera, Kimberly
Published: (2005)

A study of the effect of pressure on the visible spectrum of ozone
by: Wilson, Frederick Samuel
Published: (2009)

The reaction of ozone with an aqueous solution of: I thiourea, II sodium chloride
by: Little, Jess E.
Published: (2009)

Konstruktion av elektrolytisk ozongenerator
by: Marcus, Malmström, et al.
Published: (2015)

Ozonization of low molecular weight compounds
by: Tencza, Stephen Joseph, 1942-
Published: (1974)

Impact of Ozonation on System Performance and Growth Characteristics of Hybrid Striped Bass (Morone chrysops (f) x Morone saxatilis (m)) Reared in Recirculating Aquaculture Systems
by: Brazil, Brian Ligar
Published: (2014)

INTRACAVITARY THERAPY BY THE OZONIZED ANTISEPTIC SOLUTION IN COMPLEX TREATMENT OF PATIENTS WITH INFECTED BAND FORMATIONS OF THE LIVER
by: M. R. Garayev, et al.
Published: (2017-01-01)

Structural characterization by Nuclear Magnetic Resonance of ozonized triolein
by: Maritza F. Díaz, et al.
Published: (2008-09-01)

How Useful Is a Linear Ozone Parameterization for Global Climate Modeling?
by: Katharina Meraner, et al.
Published: (2020-04-01)

Influence of ozone precursors and particulate matter on the variation of surface ozone at an urban site of Delhi, India
by: Ashima Sharma, et al.
Published: (2016-03-01)

Application of Heterogeneous Catalytic Ozonation for Refractory Organics in Wastewater
by: Bing Wang, et al.
Published: (2019-03-01)

Ozone in the Atlantic Ocean marine boundary layer
by: Patrick Boylan, et al.
Published: (2015-04-01)

Osoongenerering
by: Denkema, Jacobus Francois
Published: (2014)

The effects of ozone therapy on postoperative adhesions and ovarian functions: An experimental study
by: Rulin Deniz, et al.
Published: (2020-01-01)