Ion-induced stress relaxation during the growth of cubic boron nitride thin films

Ion-induced stress relaxation during the growth of cubic boron nitride thin films

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Bibliographic Details
Main Author:	Abendroth, B.
Language:	English
Published:	Forschungszentrum Rossendorf 2010
Online Access:	http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28863 https://hzdr.qucosa.de/id/qucosa%3A21713 https://hzdr.qucosa.de/api/qucosa%3A21713/attachment/ATT-0/

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