Ion-induced stress relaxation during the growth of cubic boron nitride thin films
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| Language: | English |
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Forschungszentrum Rossendorf
2010
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28863 https://hzdr.qucosa.de/id/qucosa%3A21713 https://hzdr.qucosa.de/api/qucosa%3A21713/attachment/ATT-0/ |