Ion-induced stress relaxation during the growth of cubic boron nitride thin films

Bibliographic Details
Main Author:	Abendroth, B.
Language:	English
Published:	Forschungszentrum Rossendorf 2010
Online Access:	http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28863 https://hzdr.qucosa.de/id/qucosa%3A21713 https://hzdr.qucosa.de/api/qucosa%3A21713/attachment/ATT-0/

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spelling	ndltd-DRESDEN-oai-qucosa-de-qucosa-217132021-03-30T05:06:16Z Ion-induced stress relaxation during the growth of cubic boron nitride thin films urn:nbn:de:bsz:d120-qucosa-28863 eng urn:nbn:de:bsz:d120-qucosa-237209 qucosa:22351 Abendroth, B. Forschungszentrum Rossendorf 2010-03-31 2004 Wissenschaftlich-Technische Berichte / Forschungszentrum Rossendorf; FZR-406 info:eu-repo/semantics/openAccess doc-type:report info:eu-repo/semantics/report doc-type:Text https://hzdr.qucosa.de/id/qucosa%3A21713 https://hzdr.qucosa.de/api/qucosa%3A21713/attachment/ATT-0/
collection	NDLTD
language	English
sources	NDLTD
author	Abendroth, B.
spellingShingle	Abendroth, B. Ion-induced stress relaxation during the growth of cubic boron nitride thin films
author_facet	Abendroth, B.
author_sort	Abendroth, B.
title	Ion-induced stress relaxation during the growth of cubic boron nitride thin films
title_short	Ion-induced stress relaxation during the growth of cubic boron nitride thin films
title_full	Ion-induced stress relaxation during the growth of cubic boron nitride thin films
title_fullStr	Ion-induced stress relaxation during the growth of cubic boron nitride thin films
title_full_unstemmed	Ion-induced stress relaxation during the growth of cubic boron nitride thin films
title_sort	ion-induced stress relaxation during the growth of cubic boron nitride thin films
publisher	Forschungszentrum Rossendorf
publishDate	2010
url	http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-28863 https://hzdr.qucosa.de/id/qucosa%3A21713 https://hzdr.qucosa.de/api/qucosa%3A21713/attachment/ATT-0/
work_keys_str_mv	AT abendrothb ioninducedstressrelaxationduringthegrowthofcubicboronnitridethinfilms
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Ion-induced stress relaxation during the growth of cubic boron nitride thin films

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