An Investigation of Target Poisoning during Reactive Magnetron Sputtering
Objective of the present work is a broad investigation of the so called target poisoning during magnetron deposition of TiN in an Ar/N2 atmosphere. Investigations include realtime in-situ ion beam analysis of nitrogen incorporation at the Ti sputter target during the deposition process and the analy...
| Main Author: | |
|---|---|
| Language: | English |
| Published: |
Forschungszentrum Dresden-Rossendorf
2010
|
| Subjects: | |
| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-27841 https://hzdr.qucosa.de/id/qucosa%3A21611 https://hzdr.qucosa.de/api/qucosa%3A21611/attachment/ATT-0/ |
Search Result 1
Search Result 2
