An Investigation of Target Poisoning during Reactive Magnetron Sputtering
Objective of the present work is a broad investigation of the so called target poisoning during magnetron deposition of TiN in an Ar/N2 atmosphere. Investigations include realtime in-situ ion beam analysis of nitrogen incorporation at the Ti sputter target during the deposition process and the analy...
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| Language: | English |
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Forschungszentrum Dresden-Rossendorf
2010
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:bsz:d120-qucosa-27841 https://hzdr.qucosa.de/id/qucosa%3A21611 https://hzdr.qucosa.de/api/qucosa%3A21611/attachment/ATT-0/ |