Modellierung, Reglerentwurf und Praxistest eines hochdynamischen MEMS-Präzisionsbeschleunigungssensors

Modellierung, Reglerentwurf und Praxistest eines hochdynamischen MEMS-Präzisionsbeschleunigungssensors

Show other versions (1)

This paper presents the development of building up a controlled MEMS acceleration sensor. The first samples have archived a resolution of better than 500 ug and a bandwidth of more than 200 Hz. A theoretical model is built from the physical principles of the complete sensor system, consisting of the...

Full description

Bibliographic Details
Main Author: Wolfram, Heiko
Language:German
Published: Technische Universität Chemnitz 2005
Subjects:
info:eu-repo/classification/ddc/620
ddc:620
Beschleunigungssensor
Identifikation
H-Infinity Control
MEMS
Mixed-Sensitivity Approach
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200500304
https://monarch.qucosa.de/id/qucosa%3A18288
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-1/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-2/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-3/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-4/

Internet

http://nbn-resolving.de/urn:nbn:de:swb:ch1-200500304
https://monarch.qucosa.de/id/qucosa%3A18288
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-1/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-2/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-3/
https://monarch.qucosa.de/api/qucosa%3A18288/attachment/ATT-4/

Similar Items