Technologieentwicklung für kapazitive Sensoren mit bewegten Komponenten
This work is a contribution to technology development of capacitive microsensors with moved components, such as vacuum pressure sensors and angular rate sensors. It describes the sensor principles, Si microfabrication technologies and test results of prototypes. === Die Arbeit liefert einen Beitrag...
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| Format: | Doctoral Thesis |
| Language: | German |
| Published: |
2004
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| Online Access: | http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401375 https://monarch.qucosa.de/id/qucosa%3A18214 https://monarch.qucosa.de/api/qucosa%3A18214/attachment/ATT-0/ https://monarch.qucosa.de/api/qucosa%3A18214/attachment/ATT-1/ |