Technologieentwicklung für kapazitive Sensoren mit bewegten Komponenten

Technologieentwicklung für kapazitive Sensoren mit bewegten Komponenten

Show other versions (1)

This work is a contribution to technology development of capacitive microsensors with moved components, such as vacuum pressure sensors and angular rate sensors. It describes the sensor principles, Si microfabrication technologies and test results of prototypes. === Die Arbeit liefert einen Beitrag...

Full description

Bibliographic Details
Main Author: Hiller, Karla
Other Authors: Gessner, Thomas
Format: Doctoral Thesis
Language:German
Published: 2004
Subjects:
info:eu-repo/classification/ddc/620
ddc:620
Drehratensensor
Mikromechanik
Mikrosystemtechnik
Mikrotechnologie
Vakuumsensor
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401375
https://monarch.qucosa.de/id/qucosa%3A18214
https://monarch.qucosa.de/api/qucosa%3A18214/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18214/attachment/ATT-1/

Internet

http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401375
https://monarch.qucosa.de/id/qucosa%3A18214
https://monarch.qucosa.de/api/qucosa%3A18214/attachment/ATT-0/
https://monarch.qucosa.de/api/qucosa%3A18214/attachment/ATT-1/

Similar Items