Development and study of microdischarge arrays on silicon
The objective of this thesis is to provide a better understanding of various physical phenomena related to microplasmas/microdischarges. For this purpose, arrays of microreactors on silicon were studied. Different array configurations were fabricated to analyse the influence of each parameter on the...
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| Language: | English |
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Université d'Orléans
2013
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| Online Access: | http://tel.archives-ouvertes.fr/tel-00843656 http://tel.archives-ouvertes.fr/docs/00/84/36/56/PDF/mukeshkumar.kulsreshath_3200_vm.pdf |