A contribution to photonic MEMS : study of optical resonators and interferometers based on all-silicon Bragg reflectors

A contribution to photonic MEMS : study of optical resonators and interferometers based on all-silicon Bragg reflectors

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This research work has been conducted to introduce a novel class of Fabry-Perot (FP) resonators : curved FP cavity based on coating-free Bragg mirrors of cylindrical shape, obtained by silicon micromachining. Another specificity is the rather large cavity lengths (L>200 µm) combined with high qua...

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Bibliographic Details
Main Author: Malak Karam, Maurine
Language:English
Published: Université Paris-Est 2011
Subjects:
[SPI:OTHER] Engineering Sciences/Other
[SPI:OTHER] Sciences de l'ingénieur/Autre
Optical MEMS
Vibration measurements
Interferometers
Bragg mirror
Michelson interferometer
Curved Fabry-Perot cavity
Online Access:http://tel.archives-ouvertes.fr/tel-00769408
http://tel.archives-ouvertes.fr/docs/00/76/94/08/PDF/TH2011PEST1034_incomplete.pdf

Internet

http://tel.archives-ouvertes.fr/tel-00769408
http://tel.archives-ouvertes.fr/docs/00/76/94/08/PDF/TH2011PEST1034_incomplete.pdf

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