Opto-numerical analysis of AIN piezoelectric thin film operating as an actuation layer in MEMS cantilevers

Opto-numerical analysis of AIN piezoelectric thin film operating as an actuation layer in MEMS cantilevers

L'objectif de ce mémoire de thèse consiste à étudier et caractériser les propriétés de couche mince piézoélectrique de nitrure d'aluminium (AlN) utilisées comme une couche d'actionnement de micropoutres multimorphes actionnées piézoélectriquement et à évaluer leurs performances microm...

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Bibliographic Details
Main Author:	Krupa, Katarzyna
Language:	ENG
Published:	Université de Franche-Comté 2009
Subjects:	[SPI] Engineering Sciences Optique
Online Access:	http://tel.archives-ouvertes.fr/tel-00544852 http://tel.archives-ouvertes.fr/docs/00/54/48/52/PDF/Katarzyna_Krupa_these_de_doctorat.pdf

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