ETUDE PAR PHOTOEMISSION (XPS & XPD) D'HETEROSTRUCTURES D'OXYDES FONCTIONNELS EPITAXIES SUR SILICIUM

ETUDE PAR PHOTOEMISSION (XPS & XPD) D'HETEROSTRUCTURES D'OXYDES FONCTIONNELS EPITAXIES SUR SILICIUM

Cette thèse se situe dans un des axes principaux de l'INL qui a pour objectif de développer des procédés de fabrication de films minces d'oxydes monocristallins, épitaxiés sur silicium. Ces oxydes pourraient remplacer les oxydes de grille amorphes de type SiOxNy ou HfSixOyNz et répondre au...

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Bibliographic Details
Main Author:	El Kazzi, Mario
Language:	FRE
Published:	Ecole Centrale de Lyon 2007
Subjects:	[PHYS:COND] Physics/Condensed Matter Films minces d?oxydes monocristallins Spectroscopie de photoélectrons (XPS) Diffraction de photoélectrons (XPD) Epitaxie par jets moléculaires (EJM) Oxyde de grille monocristallin (LaAlO3 Gd2O3) Couche tampon : SrO SrTiO3 y-Al2O3 Diffraction sous incidence rasante d'électrons de haute énergie en réflexion (RHEED) Microscopie électronique en transmission (TEM) Diffraction de rayons X (XRD)
Online Access:	http://tel.archives-ouvertes.fr/tel-00321458 http://tel.archives-ouvertes.fr/docs/00/32/14/58/PDF/These_Mario_EL-Kazzi.pdf

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