Process and material challenges in the high rate deposition of microcrystalline silicon thin films and solar cells by Matrix Distributed Electron Cyclotron Resonance plasma
High deposition rates on large areas are industrial needs for mass production of microcrystalline silicon (μc-Si:H) solar cells. This doctoral work aims at exploring the usefulness of Matrix Distributed Electron Cyclotron Resonance (MDECR) plasmas to process the intrinsic layer of μc-Si:H p-i-n sola...
| Main Author: | |
|---|---|
| Language: | ENG |
| Published: |
Ecole Polytechnique X
2010
|
| Subjects: | |
| Online Access: | http://pastel.archives-ouvertes.fr/pastel-00550241 http://pastel.archives-ouvertes.fr/docs/00/55/02/41/PDF/PhD_thesis_Laurent_KROELY_final_version.pdf |