Silicide formation and the interaction of metals with polycrystalline Si

Silicide formation and the interaction of metals with polycrystalline Si

<p>The main factors affecting solid-phase Si-metal interactions are reported in this work. The influence of the orientation of the Si substrates and the presence of impurities in metal films and at the Si-metal interface on the formation of nickel and chromium silicides have been demonstrated....

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Bibliographic Details
Main Author: Olowolafe, Johnson Olufemi
Format: Others
Language:en
Published: 1977
Online Access:https://thesis.library.caltech.edu/8575/1/Olowolafe_jo_1977.pdf
Olowolafe, Johnson Olufemi (1977) Silicide formation and the interaction of metals with polycrystalline Si. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/JZBN-0V57. https://resolver.caltech.edu/CaltechTHESIS:07212014-113955709 <https://resolver.caltech.edu/CaltechTHESIS:07212014-113955709>

Internet

https://thesis.library.caltech.edu/8575/1/Olowolafe_jo_1977.pdf
Olowolafe, Johnson Olufemi (1977) Silicide formation and the interaction of metals with polycrystalline Si. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/JZBN-0V57. https://resolver.caltech.edu/CaltechTHESIS:07212014-113955709 <https://resolver.caltech.edu/CaltechTHESIS:07212014-113955709>

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