Molecular Dynamics Simulation of Sputtering
<p>The sputtering of metals by low-energy (keV) ion bombardment has been investigated with the molecular dynamics technique. This study, based on computer simulations, aims to elucidate experimental observations and to provide valuable theoretical insight. The systems studied include Ar<sup...
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| Format: | Others |
| Language: | en |
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1989
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| Online Access: | https://thesis.library.caltech.edu/552/4/lo-d_1989.pdf Lo, Davy (1989) Molecular Dynamics Simulation of Sputtering. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/EVKV-AW57. https://resolver.caltech.edu/CaltechETD:etd-02082007-095349 <https://resolver.caltech.edu/CaltechETD:etd-02082007-095349> |
Internet
https://thesis.library.caltech.edu/552/4/lo-d_1989.pdfLo, Davy (1989) Molecular Dynamics Simulation of Sputtering. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/EVKV-AW57. https://resolver.caltech.edu/CaltechETD:etd-02082007-095349 <https://resolver.caltech.edu/CaltechETD:etd-02082007-095349>