Hot-Wire Chemical Vapor Deposition of Silicon and Silicon Nitride for Photovoltaics: Experiments, Simulations, and Applications

Hot-Wire Chemical Vapor Deposition of Silicon and Silicon Nitride for Photovoltaics: Experiments, Simulations, and Applications

<p>Hot-wire chemical vapor deposition is a promising technique for deposition of thin amorphous, polycrystalline, and epitaxial silicon films for photovoltaic applications. Fundamental questions remain, however, about the gas-phase and surface-kinetic processes involved. To this end, the nat...

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Bibliographic Details
Main Author: Holt, Jason Knowles
Format: Others
Language:en
Published: 2003
Online Access:https://thesis.library.caltech.edu/4669/1/JKHthesis.pdf
Holt, Jason Knowles (2003) Hot-Wire Chemical Vapor Deposition of Silicon and Silicon Nitride for Photovoltaics: Experiments, Simulations, and Applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9S6-8J66. https://resolver.caltech.edu/CaltechETD:etd-11262002-143938 <https://resolver.caltech.edu/CaltechETD:etd-11262002-143938>

Internet

https://thesis.library.caltech.edu/4669/1/JKHthesis.pdf
Holt, Jason Knowles (2003) Hot-Wire Chemical Vapor Deposition of Silicon and Silicon Nitride for Photovoltaics: Experiments, Simulations, and Applications. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/Z9S6-8J66. https://resolver.caltech.edu/CaltechETD:etd-11262002-143938 <https://resolver.caltech.edu/CaltechETD:etd-11262002-143938>

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