Mechanical Characterization of Thin Films with Application to Ferroelectrics
<p>One important part of the motivation for this research work comes from the microelectromechanical systems (MEMS) technology. Its basic concept of high volume production and low unit cost can only be achieved when the devices made by microelectronics technique are reliable. The success in th...
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Zhang, Rongjing (2006) Mechanical Characterization of Thin Films with Application to Ferroelectrics. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/CJR5-DK94. https://resolver.caltech.edu/CaltechETD:etd-01312006-170959 <https://resolver.caltech.edu/CaltechETD:etd-01312006-170959>