Mechanical Characterization of Thin Films with Application to Ferroelectrics

<p>One important part of the motivation for this research work comes from the microelectromechanical systems (MEMS) technology. Its basic concept of high volume production and low unit cost can only be achieved when the devices made by microelectronics technique are reliable. The success in th...

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Bibliographic Details
Main Author: Zhang, Rongjing
Format: Others
Published: 2006
Online Access:https://thesis.library.caltech.edu/420/1/ch0_final_R.pdf
https://thesis.library.caltech.edu/420/2/ch1_final_R.pdf
https://thesis.library.caltech.edu/420/3/ch2_final_R.pdf
https://thesis.library.caltech.edu/420/4/ch3_final_R.pdf
https://thesis.library.caltech.edu/420/5/ch4_final_R.pdf
https://thesis.library.caltech.edu/420/6/ch5_final_R.pdf
Zhang, Rongjing (2006) Mechanical Characterization of Thin Films with Application to Ferroelectrics. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/CJR5-DK94. https://resolver.caltech.edu/CaltechETD:etd-01312006-170959 <https://resolver.caltech.edu/CaltechETD:etd-01312006-170959>