Electron tunneling through thin films of aluminum nitride
Thin film structures involving Aluminum as the base electrode, Aluminum Nitride as the insulating layer, Magnesium, Aluminum or Gold as the counterelectrodes were fabricated by nitriding a freshly deposited Aluminum film in a Nitrogen glow discharge with the thickness of the insulator varying from s...
Internet
https://thesis.library.caltech.edu/3796/1/Lewicki_g_1966.pdfLewicki, George W. (1966) Electron tunneling through thin films of aluminum nitride. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/QDH7-C768. https://resolver.caltech.edu/CaltechETD:etd-09272002-150142 <https://resolver.caltech.edu/CaltechETD:etd-09272002-150142>