Low-Energy Ion Beamline-Scattering Apparatus with Application to Charge Exchange Collisions at Surfaces
<p>Ion-surface interactions are important in a variety of fields such as plasma physics, surface analysis, and semiconductor manufacturing. However, the low-energy regime (50 eV - 1 keV) has been generally avoided by the research community because of the experimental challenges associated wit...
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Gordon, Michael Joseph (2004) Low-Energy Ion Beamline-Scattering Apparatus with Application to Charge Exchange Collisions at Surfaces. Dissertation (Ph.D.), California Institute of Technology. doi:10.7907/w315-sr88. https://resolver.caltech.edu/CaltechETD:etd-01022004-085659 <https://resolver.caltech.edu/CaltechETD:etd-01022004-085659>