Deposition, Characterization, and Fabrication of a Zinc Oxide Piezoelectric Thin Film Microspeaker Using DC Reactive Sputtering
A piezoelectric microspeaker device that could be used in a variety of acoustic applications was designed and fabricated using a thin film ZnO layer that was reactively DC sputtered onto a single crystalline n-type silicon substrate. When tested the microspeaker did not produce sound due to complica...
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| Format: | Others |
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DigitalCommons@CalPoly
2012
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| Online Access: | https://digitalcommons.calpoly.edu/theses/767 https://digitalcommons.calpoly.edu/cgi/viewcontent.cgi?article=1811&context=theses |