DESIGN, FABRICATION, MODELING AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MEMBRANES

DESIGN, FABRICATION, MODELING AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MEMBRANES

This thesis covers the design, fabrication, modeling and characterization of electrostatically actuated silicon membranes, with applications to microelectromechanical systems (MEMS). A microfabrication process was designed to realize thin membranes etched into a silicon wafer using a wet anisotropic...

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Bibliographic Details
Main Author: Stahl, Brian C
Format: Others
Published: DigitalCommons@CalPoly 2008
Subjects:
MEMS
membrane
etching
microfabrication
silicon
Materials Science and Engineering
Semiconductor and Optical Materials
Online Access:https://digitalcommons.calpoly.edu/theses/90
https://digitalcommons.calpoly.edu/cgi/viewcontent.cgi?article=1098&context=theses

Internet

https://digitalcommons.calpoly.edu/theses/90
https://digitalcommons.calpoly.edu/cgi/viewcontent.cgi?article=1098&context=theses

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