Photolithographic structuring of stretchable conductors and sub-kPa pressure sensors
No === This paper presents a novel method to prepare stretchable conductors and pressure sensors based on the gold/polydimethylsiloxane (PDMS) system. The gold films were sputtered onto structured PDMS surfaces produced with a photolithographic surface treatment with the aim of reducing tensile stra...
Main Authors: | , , , , , , |
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Language: | en |
Published: |
2019
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Subjects: | |
Online Access: | http://hdl.handle.net/10454/17042 |