Scandium Oxide Thin Films and Their Optical Properties in the Extreme Ultraviolet
This study reports on the physical and optical characterization of scandium oxide thin films. Thin films of scandium oxide, 20-40 nm thick, were deposited on silicon wafers, quartz slides, and silicon photodiodes by reactively sputtering scandium in an oxygen environment. These samples were characte...
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| Format: | Others |
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BYU ScholarsArchive
2007
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| Online Access: | https://scholarsarchive.byu.edu/etd/1285 https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2284&context=etd |