Integrated Piezoresistive Sensing for Feedback Control of Compliant MEMS

Integrated Piezoresistive Sensing for Feedback Control of Compliant MEMS

Feedback control of MEMS devices has the potential to significantly improve device performance and reliability. One of the main obstacles to its broader use is the small number of on-chip sensing options available to MEMS designers. A method of using integrated piezoresistive sensing is proposed and...

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Bibliographic Details
Main Author: Messenger, Robert K.
Format: Others
Published: BYU ScholarsArchive 2007
Subjects:
MEMS
compliant mechanisms
feedback control
piezoresistivity
sensors
thermal actuators
long displacement
self sensing
Mechanical Engineering
Online Access:https://scholarsarchive.byu.edu/etd/1202
https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2201&context=etd

Internet

https://scholarsarchive.byu.edu/etd/1202
https://scholarsarchive.byu.edu/cgi/viewcontent.cgi?article=2201&context=etd

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