Single-layer graphene on silicon nitride micromembrane resonators

Single-layer graphene on silicon nitride micromembrane resonators

Due to their low mass, high quality factor, and good optical properties, silicon nitride (SiN) micromembrane resonators are widely used in force and mass sensing applications, particularly in optomechanics. The metallization of such membranes would enable an electronic integration with the prospect...

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Bibliographic Details
Main Authors: Schmid, Silvan (Author), Bagci, Tolga (Author), Zeuthen, Emil (Author), Taylor, Jacob M. (Author), Herring, Patrick Kenichi (Author), Cassidy, Maja C. (Author), Marcus, Charles M. (Author), Guillermo Villanueva, Luis (Author), Amato, Bartolo (Author), Boisen, Anja (Author), Cheol Shin, Yong (Author), Kong, Jing (Contributor), Sørensen, Anders S. (Author), Usami, Koji (Author), Polzik, Eugene S. (Author), Shin, Yong Cheol (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Materials Science and Engineering (Contributor)
Format: Article
Language:English
Published: American Institute of Physics, 2014-05-28T15:47:24Z.
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