Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition

Large-scale 2D electronics based on single-layer MoS[subscript 2] grown by chemical vapor deposition

2D nanoelectronics based on single-layer MoS[subscript 2] offers great advantages for both conventional and ubiquitous applications. This paper discusses the large-scale CVD growth of single-layer MoS[subscript 2] and fabrication of integrated devices and circuits for the first time. Fundamental bui...

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Bibliographic Details
Main Authors: Wang, H. (Contributor), Yu, L. (Contributor), Lee, Y.-H (Contributor), Fang, W. (Contributor), Hsu, Allen Long (Contributor), Chin, M. (Author), Dubey, Madan (Author), Li, L.-J (Author), Kong, Jing (Contributor), Herring, Patrick Kenichi (Contributor), Palacios, Tomas (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science (Contributor), Massachusetts Institute of Technology. Department of Physics (Contributor), Massachusetts Institute of Technology. Microsystems Technology Laboratories (Contributor)
Format: Article
Language:English
Published: Institute of Electrical and Electronics Engineers (IEEE), 2014-05-22T18:49:20Z.
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