White-light scanning interferometer for absolute nano-scale gap thickness measurement
A special configuration of white-light scanning interferometer is described for measuring the absolute air gap thickness between two planar plates brought into close proximity. The measured gap is not located in any interference arm of the interferometer, but acts as an amplitude-and-phase modulator...
| Main Authors: | , , , |
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| Other Authors: | , , , |
| Format: | Article |
| Language: | English |
| Published: |
Optical Society of America,
2013-07-26T16:31:58Z.
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| Subjects: | |
| Online Access: | Get fulltext |