Development and characterization of an iodine field emission ion source for FIB applications
Emission of positive and negative ions is possible when a room temperature molten salt, or ionic liquid, is exposed to a sufficiently high electric field. Ionic liquid ion sources (ILIS) have shown potential to be used in various focused ion beam (FIB) applications, since their operation and charact...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
American Vacuum Society,
2010-11-23T13:44:32Z.
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| Subjects: | |
| Online Access: | Get fulltext |