Lithographically directed materials assembly
We have developed a processing method that significantly reduces the number of steps necessary to yield a surface that directs block copolymer assembly. This methodology employs a single resistless lithography step that directly changes the surface energy without requiring subsequent material deposi...
| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
The International Society for Optical Engineering,
2010-03-17T15:45:29Z.
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| Subjects: | |
| Online Access: | Get fulltext |