Wet-based digital etching on GaN and AlGaN

• Main Authors: Shih, Pao-Chuan (Author), Engel, Zachary (Author), Ahmad, Habib (Author), Doolittle, William Alan (Author), Palacios, Tomás (Author)
• Format: Article
• Language: English
• Published: AIP Publishing, 2022-04-19T15:43:03Z.
• Subjects: Article
• Online Access: Get fulltext

Department of Defense (DoD)