Wet-based digital etching on GaN and AlGaN

Department of Defense (DoD)

Bibliographic Details
Main Authors:	Shih, Pao-Chuan (Author), Engel, Zachary (Author), Ahmad, Habib (Author), Doolittle, William Alan (Author), Palacios, Tomás (Author)
Format:	Article
Language:	English
Published:	AIP Publishing, 2022-04-19T15:43:03Z.
Subjects:	Article
Online Access:	Get fulltext

Get fulltext

Similar Items