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|a Jiang, Bo
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|a Meng, Kai
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|a Youcef-Toumi, Kamal
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|a Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry
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|b The Optical Society,
|c 2022-01-27T13:36:27Z.
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|z Get fulltext
|u https://hdl.handle.net/1721.1/139762
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|a Ellipsometry is an important metrology tool in a plethora of industries. The measurement accuracy can be significantly affected by the existence of Poisson-Gaussian mixed noise. This paper quantifies the induced error on normalized Mueller matrix measurements through statistical analysis. A method is then proposed to mitigate the effects of Poisson-Gaussian noise in spectroscopic ellipsometry signal demodulation, based on maximum likelihood estimation. The noise is characterized through experiments on an in-house setup. The improved performance of dimension reconstruction from the proposed method is demonstrated through simulations.
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|a Article
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|t 10.1364/OE.432793
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|t Optics Express
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