Scalable fabrication of coupled NV center - photonic crystal cavity systems by self-aligned N ion implantation
© 2017 Optical Society of America. Towards building large-scale integrated photonic systems for quantum information processing, spatial and spectral alignment of single quantum systems to photonic nanocavities is required. Here, we demonstrate spatially targeted implantation of nitrogen vacancy (NV)...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Optical Society of America,
2022-06-03T20:32:21Z.
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| Subjects: | |
| Online Access: | Get fulltext |