In₀.₄₉ Ga₀.₅₁ P/GaAs heterojunction bipolar transistors (HBTs) on 200 mm Si substrates: Effects of base thickness, base and sub-collector doping concentrations
We report performance of InGaP/GaAs heterojunction bipolar transistors (HBTs) fabricated on epitaxial films directly grown onto 200 mm silicon (Si) substrates using a thin 100% germanium (Ge) buffer layer. Both buffer layer and device layers were grown epitaxially using metalorganic chemical vapor d...
Main Author: | |
---|---|
Other Authors: | |
Format: | Article |
Language: | English |
Published: |
AIP Publishing,
2020-09-09T11:33:48Z.
|
Subjects: | |
Online Access: | Get fulltext |