Infrared vertically-illuminated photodiode for chip alignment feedback
We report on vertically-illuminated photodiodes fabricated in the GlobalFoundries 45nm 12SOI node and on a packaging concept for optically-interconnected chips. The photodiodes are responsive at 1180 nm -a wavelength currently used in chip-to-chip communications. They have further a wide field-of-vi...
| Main Authors: | , |
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| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing,
2020-04-30T19:53:38Z.
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| Subjects: | |
| Online Access: | Get fulltext |