Review Article: Active scanning probes: A versatile toolkit for fast imaging and emerging nanofabrication

With the recent advances in the field of nanotechnology, measurement and manipulation requirements at the nanoscale have become more stringent than ever before. In atomic force microscopy, high-speed performance alone is not sufficient without considerations of other aspects of the measurement task,...

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Bibliographic Details
Main Authors: Rangelow, Ivo W. (Author), Ivanov, Tzvetan (Author), Ahmad, Ahmad (Author), Kaestner, Marcus (Author), Lenk, Claudia (Author), Holz, Mathias (Author), Reum, Alexander (Author), Soltani Bozchalooi, Iman (Contributor), Xia, Fangzhou (Contributor), Youcef-Toumi, Kamal (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Mechanical Engineering (Contributor)
Format: Article
Language:English
Published: American Vacuum Society (AVS), 2019-02-12T19:02:46Z.
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