Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators
This papers investigates device approaches towards the confinement of acoustic modes in unreleased UHF MEMS resonators. Acoustic mode confinement is achieved using specially designed mechanically coupled acoustic cavities known as acoustic Bragg Grating Coupler structures to spatially localize the v...
| Main Authors: | , , , |
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| Other Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Springer Berlin Heidelberg,
2018-09-07T19:28:14Z.
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| Subjects: | |
| Online Access: | Get fulltext |