Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces

Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces

The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Fo...

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Bibliographic Details
Main Authors: Pinilla-Cienfuegos, Elena (Author), Mañas-Valero, Samuel (Author), Tatay, Sergio (Author), Forment-Aliaga, Alicia (Author), Coronado, Eugenio (Author), Navarro Moratalla, Efren Adolfo (Contributor)
Other Authors: Massachusetts Institute of Technology. Department of Physics (Contributor), MIT Materials Research Laboratory (Contributor)
Format: Article
Language:English
Published: MDPI AG, 2018-04-13T18:55:29Z.
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