Local Oxidation Nanolithography on Metallic Transition Metal Dichalcogenides Surfaces
The integration of atomically-thin layers of two dimensional (2D) materials in nanodevices demands for precise techniques at the nanoscale permitting their local modification, structuration or resettlement. Here, we present the use of Local Oxidation Nanolithography (LON) performed with an Atomic Fo...
Main Authors: | , , , , , |
---|---|
Other Authors: | , |
Format: | Article |
Language: | English |
Published: |
MDPI AG,
2018-04-13T18:55:29Z.
|
Subjects: | |
Online Access: | Get fulltext |